MICRO INTERLOCKING MANUFACTURED BY LASER ABLATION
DS 32: Proceedings of DESIGN 2004, the 8th International Design Conference, Dubrovnik, Croatia
Year: 2004
Editor: Marjanovic D.
Author: Liess, H.; Reiländer, U.
Section: TECHNICAL SYSTEMS
Page(s): 1303 - 1308
Abstract
Piezoelectrically driven linear actuator devices, e.g. inchworm motors are widely spread in technique and research. The inherent disadvantage of those actuator devices is the insufficient carrying capability. To overcome those problems the traditional friction clamping mechanism can be substituted with diverse interlocking mechanism. Micro ridges based on silicon structures support maximum loads up to 500N. This paper presents the advantages of micro interlocking mechanism in steel to significantly increase the carrying capability up to kN ranges of piezoelectric actuators. Furthermore it offers a technique to process these structures by using laser ablation. Additionally ways of a cost-efficient mass production were discussed.
Keywords: micro-tooth, micromechanic, piezoelectric, laser ablation